Laser Glass Welding

Overview

Laser welded glass in T-joint configuration
© Photo Fraunhofer USA CLA

Laser welded glass in T-joint configuration

Laser welded glass wafers in different joint configurations
© Photo Fraunhofer USA CLA

Laser welded glass wafers in different joint configurations

Laser welding of glass has been developed for borosilicate glass using CO2 laser. Due to the crack susceptibility of glass, the process requires careful development. A number of joints such as butt, penetration overlap, T- and fillet edge joints have been successfully achieved. Cross-sections of welded joints show a very smooth transition between the joined glass wafers. Joints have been tested positively for hermetic sealing. Localized welding of glass with high surface quality has been achieved.

Localized laser bonding of glass-to-silicon has been successfully established using low power Nd:YAG and diode lasers. Compared to anodic bonding, no voltage and no area heating are required to facilitate the bonding process.

Advantages

  • Localized joining
  • High sterile surface quality
  • Hermetic sealing
  • Non-contact

Laser Applications

  • Glass-glass welding
  • Glass-silicon bonding
  • Hermetic sealing
  • MEMS packaging
  • Bio-compatibility
  • Sterile surface quality

Industries

  • Medical devices
  • Bio-medical implants
  • Optoelectronics

Materials

  • Borosilicate glass
  • Fused silica glass
  • Silicon

  • Herfurth H. et al, “Joining challenges in the packaging of BioMEMS”,23rd  ICALEO, 2004, FL.